Influence of the initial nitrogen content in titanium films on the nitridation and silicidation processes
C. Jiménez, J. Pérez-Rigueiro, L. Vázquez, M. Fernández, R. Pérez-Casero, J.M. Martínez-DuartVolume:
305
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(97)00115-6
File:
PDF, 523 KB
english, 1997