The Influence of Substrate on the Mechanical and...

The Influence of Substrate on the Mechanical and Tribological Characteristics of MEMS Materials for Space Applications

Merie, Violeta, Pustan, Marius, Birleanu, Corina, Negrea, Gavril
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Volume:
658
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.658.329
Date:
October, 2014
File:
PDF, 3.28 MB
english, 2014
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