Crystallographic and morphological characterization of...

Thin Solid Films 1997 Vol. 307; Iss. 1-2

Crystallographic and morphological characterization of reactively sputtered Ta, TaN and TaNO thin films

Momtchil Stavrev, Dirk Fischer, Christian Wenzel, Kurt Drescher, Norbert Mattern
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Volume:
307
Year:
1997
Language:
english
Pages:
10
DOI:
10.1016/s0040-6090(97)00319-2
File:
PDF, 1.00 MB
english, 1997
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