Study on High Quality Polycrystalline Silicon p/n Films...

Advanced Materials Research 2012 / 2 Vol. 476-478

Study on High Quality Polycrystalline Silicon p/n Films Fabrication through Recrystallization by RTP

Zhang, Li Wei, Mei, Xin Li, Lu, Jing Xiao, Zhang, Rui, Chu, Shi Yong, Wen, Shu Tang
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Volume:
476-478
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.476-478.1776
Date:
February, 2012
File:
PDF, 1014 KB
english, 2012
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