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Application of high energy resolved X-ray emission spectroscopy for monitoring of silicide formation in Co/SiO2/Si system
E.Z Kurmaev, S.N Shamin, V.R Galakhov, I KaskoVolume:
311
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(97)00398-2
File:
PDF, 252 KB
english, 1997