Characterization of the oxidation rate of densified SiN...

Thin Solid Films 1997 Vol. 311; Iss. 1-2

Characterization of the oxidation rate of densified SiN thin films by Auger and infrared absorption spectroscopies

Jesús Carrillo-López, Arturo Morales-Acevedo
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Volume:
311
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(97)00442-2
File:
PDF, 215 KB
english, 1997
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