MgO by Injection CVD

Thin Solid Films 1997 Vol. 311; Iss. 1-2

MgO by Injection CVD

A Abrutis, V Kubilius, A Teišerskis, V Bigelyt≐, V Galindo, F Weiss, J.P Sénateur, B Vengalis, A Jukna, R Butkut≐
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Volume:
311
Year:
1997
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(97)00456-2
File:
PDF, 586 KB
english, 1997
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