Direct observation of water incorporation in PECVD SiO2...

Thin Solid Films 1997 Vol. 311; Iss. 1-2

Direct observation of water incorporation in PECVD SiO2 films by UV-Visible ellipsometry

C Vallée, A Goullet, A Granier
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Volume:
311
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(97)00471-9
File:
PDF, 205 KB
english, 1997
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