Structural and electrical characterisations of rapid...

Structural and electrical characterisations of rapid thermal annealed thin silicon oxide films on silicon

Y.M Chan, C.K Choo, W.K Choi
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Volume:
317
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(97)00518-x
File:
PDF, 114 KB
english, 1998
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