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Preparation of a new tetragonal copper oxynitride phase by reactive magnetron sputtering
A von Richthofen, R Domnick, R Cremer, D NeuschützVolume:
317
Year:
1998
Language:
english
Pages:
3
DOI:
10.1016/s0040-6090(97)00538-5
File:
PDF, 180 KB
english, 1998