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Effect of Sputtering Power on Structural and Optical Properties of AlN Thin Film Deposited by Reactive DC Sputtering Technique
Witit-Anun, Nirun, Kaewkhao, Jakrapong, Chaiyakun, SurasingVolume:
770
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.770.177
Date:
September, 2013
File:
PDF, 645 KB
english, 2013