WSiX thin films for resistors

WSiX thin films for resistors

C.J Backhouse, G Este, J.C Sit, S.K Dew, M.J Brett
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Volume:
311
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(97)00700-1
File:
PDF, 167 KB
english, 1997
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