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Electron microscopy analysis of the microstructure of Ti1−xAlxN alloy thin films prepared using a chemical vapour deposition method
Shozo Ikeda, Sandra Gilles, Bernard ChenevierVolume:
315
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(97)00706-2
File:
PDF, 1.46 MB
english, 1998