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Performance of 3C-SiC thin films as protective coatings for silicon-micromachined atomizers
Narayanan Rajan, Christian A Zorman, Mehran Mehregany, Russell DeAnna, Rex HarveyVolume:
315
Year:
1998
Language:
english
Pages:
9
DOI:
10.1016/s0040-6090(97)00708-6
File:
PDF, 2.50 MB
english, 1998