Mechanical stress in micromachined components caused by humidity-induced in-plane expansion of thin polymer films
R. Buchhold, A. Nakladal, G. Gerlach, K. Sahre, K.-J. EichhornVolume:
312
Year:
1998
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(97)00721-9
File:
PDF, 695 KB
english, 1998