Porous structure of silica films obtained by monosilane...

Thin Solid Films 1998 Vol. 315; Iss. 1-2

Porous structure of silica films obtained by monosilane oxidation

F.N Dultsev, L.A Nenasheva, L.L Vasilyeva
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Volume:
315
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(97)00748-7
File:
PDF, 174 KB
english, 1998
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