Deposition and properties of germanium/carbon films...

Thin Solid Films 1998 Vol. 322; Iss. 1-2

Deposition and properties of germanium/carbon films deposited from tetramethylgermanium in a parallel plate RF discharge

M Gazicki, R Ledzion, R Mazurczyk, S Pawłowski
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Volume:
322
Year:
1998
Language:
english
Pages:
9
DOI:
10.1016/s0040-6090(97)00908-5
File:
PDF, 412 KB
english, 1998
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