Humidity Sensors on Thermally Oxidized Silicon Substrates

Advanced Materials Research 2014 / 6 Vol. 970

Humidity Sensors on Thermally Oxidized Silicon Substrates

Low, Cheng Yang, Chan, Kah Yoong, Ng, Zi Neng, Hoon, Jian Wei, Pang, Wai Leong
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Volume:
970
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.970.111
Date:
June, 2014
File:
PDF, 295 KB
english, 2014
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