Effect of Current at Aluminum Target on the AZO Thin Films...

Advanced Materials Research 2014 / 6 Vol. 979

Effect of Current at Aluminum Target on the AZO Thin Films by DC Magnetron Sputtering

Boosabarat, Pornpipat, Honglertkongsakul, Kanchaya, Ngamrungroj, Dusit, Witit-Anun, Nirun, Chaiyakun, Surasing
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Volume:
979
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.979.289
Date:
June, 2014
File:
PDF, 259 KB
english, 2014
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