Low-temperature deposition of films from...

Thin Solid Films 1998 Vol. 323; Iss. 1-2

Low-temperature deposition of films from tetrakis(dimethylamido)titanium and ammonia

Alan Berry, Robert Mowery, Noel H Turner, Larry Seitzman, Derren Dunn, Harold Ladouceur
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
323
Year:
1998
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(97)00963-2
File:
PDF, 1.53 MB
english, 1998
Conversion to is in progress
Conversion to is failed