Influence of substrate temperature and target composition on the properties of yttria-stabilized zirconia thin films grown by r.f. reactive magnetron sputtering
M Boulouz, A Boulouz, A Giani, A BoyerVolume:
323
Year:
1998
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(97)01053-5
File:
PDF, 333 KB
english, 1998