TiN barrier integrity and volcano formation in W-plug...

Thin Solid Films 1998 Vol. 320; Iss. 1

TiN barrier integrity and volcano formation in W-plug applications

S Parikh, L Akselrod, J Gardner, Karl Armstrong, N Parekh
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Volume:
320
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(97)01061-4
File:
PDF, 1.60 MB
english, 1998
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