Self-aligned Ti and Co silicides for high performance...

Self-aligned Ti and Co silicides for high performance sub-0.18 μm CMOS technologies

J.A Kittl, Q.Z Hong
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Volume:
320
Year:
1998
Language:
english
Pages:
12
DOI:
10.1016/s0040-6090(97)01069-9
File:
PDF, 919 KB
english, 1998
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