![](/img/cover-not-exists.png)
Effect of implantation oxide on the Ti- and Co-silicidation of narrow diffusion and poly-lines
A Lauwers, A Naem, M de Potter, K MaexVolume:
320
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(97)01070-5
File:
PDF, 488 KB
english, 1998