Effect of implantation oxide on the Ti- and Co-silicidation...

Effect of implantation oxide on the Ti- and Co-silicidation of narrow diffusion and poly-lines

A Lauwers, A Naem, M de Potter, K Maex
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Volume:
320
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(97)01070-5
File:
PDF, 488 KB
english, 1998
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