Chemical and Electrical Properties of ZnS Deposited with...

Materials Science Forum 2007 Vol. 544-545

Chemical and Electrical Properties of ZnS Deposited with DEZ and H2S by Atomic Layer Deposition Method

Kuk, Seoung Woo, Bang, Seok Hwan, Kim, In Hoe, Jeon, Sun Yeol, Jeon, Hyeong Tag, Park, Hyung Ho, Chang, Ho Jung
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Volume:
544-545
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.544-545.689
File:
PDF, 263 KB
english, 2007
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