Rapid and Efficient Oxidation Process of SiC by In Situ...

Materials Science Forum 2010 / 4 Vol. 645-648

Rapid and Efficient Oxidation Process of SiC by In Situ Multiple RTP Steps

Constant, Aurore, Camara, Nicolas, Godignon, Phillippe, Berthou, Maxime, Camassel, Jean, Decams, Jean Manuel
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.817
Date:
April, 2010
File:
PDF, 3.66 MB
english, 2010
Conversion to is in progress
Conversion to is failed