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Measurement of Nitrogen Concentration in Cz Silicon Crystals
Inoue, N., Hashimoto, A., Shingu, K., Masumoto, K.Volume:
95-96
Year:
2004
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.95-96.489
File:
PDF, 349 KB
english, 2004