Thin tantalum oxide films prepared by 172 nm Excimer lamp irradiation using sol–gel method
Jun-Ying Zhang, Li-Jian Bie, Vincent Dusastre, Ian W BoydVolume:
318
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(97)01171-1
File:
PDF, 225 KB
english, 1998