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TiN/Ti film formation by vacuum arc deposition with droplet shield plate
Hirofumi Takikawa, Koji Shinsako, Tateki SakakibaraVolume:
316
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(98)00392-7
File:
PDF, 608 KB
english, 1998