Effect of temperature and substrate on the growth behaviors...

Effect of temperature and substrate on the growth behaviors of chemical vapor deposited Al films with dimethylethylamine alane source

Tae Woong Jang, Won Moon, Jong Tae Baek, Byung Tae Ahn
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Volume:
333
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(98)00855-4
File:
PDF, 532 KB
english, 1998
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