Formation of titanium nitride films by energetic cluster impact deposition
Yu Guoqing, Chen Jingsheng, Shi Ying, Pan Haochang, Zhu Dezhang, Xu Hongjie, Zheng ZhihaoVolume:
335
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(98)00886-4
File:
PDF, 183 KB
english, 1998