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Effect of substrate heating on elimination of pinholes in sputtering deposited SiO2 films on LiNbO3 single crystal substrates
Hirotoshi Nagata, Tetsuya Fujino, Naoki Mitsugi, Masumi TamaiVolume:
335
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(98)00967-5
File:
PDF, 379 KB
english, 1998