Micromachining of pure silicon by molecular dynamics

Thin Solid Films 1998 Vol. 334; Iss. 1-2

Micromachining of pure silicon by molecular dynamics

Tadatoshi Nozaki, Masao Doyama, Yoshiaki Kogure, Tatsuo Yokotsuka
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Volume:
334
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(98)01148-1
File:
PDF, 103 KB
english, 1998
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