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Properties of polycrystalline silicon films prepared from fluorinated precursors
Swati Ray, Sumita Mukhopadhyay, S.C Saha, Sukti HazraVolume:
337
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(98)01166-3
File:
PDF, 508 KB
english, 1999