Properties of polycrystalline silicon films prepared from...

Properties of polycrystalline silicon films prepared from fluorinated precursors

Swati Ray, Sumita Mukhopadhyay, S.C Saha, Sukti Hazra
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Volume:
337
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(98)01166-3
File:
PDF, 508 KB
english, 1999
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