Silicon quantum integrated circuits – an attempt to...

Thin Solid Films 1998 Vol. 336; Iss. 1-2

Silicon quantum integrated circuits – an attempt to fabricate silicon-based quantum devices using CMOS fabrication techniques

D.J Paul, B Coonan, G Redmond, B.J O’Neill, G.M Crean, B Holländer, S Mantl, I Zozoulenko, K.-F Berggren, J.-L Lazzari, F Arnaud d’Avitaya, J Derrien
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Volume:
336
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(98)01219-x
File:
PDF, 536 KB
english, 1998
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