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RF-sputtering deposition of Al/Al2O3 multilayers
Le Paven-Thivet, C. Malibert, Ph. Houdy, P.A. AlbouyVolume:
336
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(98)01288-7
File:
PDF, 722 KB
english, 1998