Defect distribution and morphology development of SiGe...

Thin Solid Films 1998 Vol. 336; Iss. 1-2

Defect distribution and morphology development of SiGe layers grown on Si(100) substrates by LPE

A.M Sembian, M Konuma, I Silier, A Gutjahr, N Rollbühler, F Banhart, S Moorthy Babu, P Ramasamy
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Volume:
336
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(98)01306-6
File:
PDF, 387 KB
english, 1998
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