Spectroscopic study of nanocrystalline TiO2 thin films grown by atomic layer deposition
A. Suisalu, J. Aarik, H. Mändar, I. SildosVolume:
336
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(98)01314-5
File:
PDF, 160 KB
english, 1998