Electrical characterization of Ta2O5 films deposited by laser reactive ablation of metallic Ta
Zheng-Wen Fu, Liang-Yao Chen, Qi-Zong QinVolume:
340
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(98)01444-8
File:
PDF, 242 KB
english, 1999