![](/img/cover-not-exists.png)
Stress formation and relaxation in amorphous Ta–Cr films
P. Andersen, M. Moske, K. Dyrbye, J. BøttigerVolume:
340
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(98)01452-7
File:
PDF, 216 KB
english, 1999