Iridium film growth with indium tris-acetylacetonate:...

Thin Solid Films 1999 Vol. 346; Iss. 1-2

Iridium film growth with indium tris-acetylacetonate: oxygen and substrate effects

Y.-M. Sun, J.P. Endle, K. Smith, S. Whaley, R. Mahaffy, J.G. Ekerdt, J.M. White, R.L. Hance
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Volume:
346
Year:
1999
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(98)01458-8
File:
PDF, 962 KB
english, 1999
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