The stacking faults and their strain effect at the Si/SiO2 interfaces of a directly bonded SOI (silicon on insulator)
Dong-Woon Shin, Doo-Jin Choi, Geung-Ho KimVolume:
346
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(98)01468-0
File:
PDF, 644 KB
english, 1999