A Method for Attenuating the Spurious Responses of Aluminum Nitride Micromechanical Filters
Olsson, Roy H., Nguyen, Janet, Pluym, Tammy, Hietala, Vincent M.Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2014.2308544
Date:
October, 2014
File:
PDF, 3.21 MB
english, 2014