Diamond-like carbon films with extremely low stress
Sushil Kumar, D. Sarangi, P.N. Dixit, O.S. Panwar, R. BhattacharyyaVolume:
346
Year:
1999
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(98)01500-4
File:
PDF, 978 KB
english, 1999