Thickness and quality of spin-coated polymer films by...

Thickness and quality of spin-coated polymer films by two-angle ellipsometry

Christopher B. Walsh, Elias I. Franses
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Volume:
347
Year:
1999
Language:
english
Pages:
11
DOI:
10.1016/s0040-6090(98)01619-8
File:
PDF, 298 KB
english, 1999
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