Effects of substrate temperature on the properties of tetrahedral amorphous carbon films
B.K. Tay, X. Shi, E.J. Liu, H.S. Tan, L.K. CheahVolume:
346
Year:
1999
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(98)01756-8
File:
PDF, 652 KB
english, 1999