SiC film deposition by DC magnetron sputtering

Thin Solid Films 1999 Vol. 345; Iss. 1

SiC film deposition by DC magnetron sputtering

Li Gou, Changsong Qi, Junguo Ran, Changqiong Zheng
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Volume:
345
Year:
1999
Language:
english
Pages:
3
DOI:
10.1016/s0040-6090(99)00070-x
File:
PDF, 125 KB
english, 1999
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