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Composite germanium/C:H films prepared by DC unbalanced magnetron sputtering
H. Biederman, V. Stundžia, , D. Slavı́nská, J. Žalman, , J. Pešička, , M. Vaněček, J. Zemek, , W. FukarekVolume:
351
Year:
1999
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(99)00303-x
File:
PDF, 2.03 MB
english, 1999