Optimized calibration method for Fourier transform infrared phase-modulated ellipsometry
E. Garcia-Caurel, E. Bertran, A. CanillasVolume:
354
Year:
1999
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(99)00373-9
File:
PDF, 150 KB
english, 1999