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Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask
P Äyräs, J.T Rantala, R Levy, M.R Descour, S Honkanen, N PeyghambarianVolume:
352
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(99)00404-6
File:
PDF, 86 KB
english, 1999